Formation of a surface on an optical component

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

Reexamination Certificate

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Details

C385S129000, C385S131000, C385S132000, C385S014000, C438S031000, C438S029000, C438S069000

Reexamination Certificate

active

06563997

ABSTRACT:

BACKGROUND
1. Field of the Invention
The invention relates to one or more optical networking components. In particular, the invention relates to optical components having a reflecting surface.
2. Background of the Invention
Many optical components include one or more surfaces where light signals are reflected. For instance, many optical components include waveguides that intersect. A reflecting surface is often formed at the intersection for reflecting light signals from one waveguide into the other waveguide. The position and profile of the reflecting surface relative to the waveguides should be precise in order to ensure reflection of the light signals in the desired direction.
A reflecting surface, at the intersection of the waveguides is often formed by performing two sequential mask and etch steps. The limitations of photolithography mask printing equipment prevents precise alignment of two sequentially formed masks. As a result, the portion of the reflecting surface formed during the first etch is often not aligned with the portion of the reflecting surface formed during the second etch. Accordingly, the portion of the reflecting surface formed during the first etch has a different position relative to the waveguides than does the portion of the reflecting surface formed during the second etch. The inconsistent positioning of the reflecting surface reduces the performance quality of the optical component.
For the above reasons, there is a need for a component having a reflecting surface with an accurate position relative to the waveguides.
SUMMARY OF THE INVENTION
The invention relates to a method of forming an optical component. The method includes forming a first mask so as to protect a ridge region of a light transmitting medium. The ridge region is a region of the light transmitting medium a region where a ridge of a waveguide will be formed. The method also includes performing a first etch of the light transmitting medium so as to form a first side of the ridge. The first mask serves to define a profile of the first side of the ridge during the first etch. The method further includes performing a second etch of the light transmitting medium so as to form a second side of the ridge. The first mask also serves to define a profile of the second side of the ridge during the second etch. In some instances, the second side is formed so as to have a different height than the first side.
The invention also relates to a method of forming a reflecting surface on an optical component. The method includes forming a first mask so as to protect a ridge region of a light transmitting medium. The ridge region is a region where a ridge of a waveguide will be formed. The method also includes performing a first etch of the light transmitting medium so as to form a side of the ridge. The first mask defines a profile of the side of the ridge during the first etch. The method further includes performing a second etch of the light transmitting medium so as to form the reflecting surface. The first mask defines a profile of the reflecting surface during the second etch.
In one embodiment of the invention, the second etch is performed before the first etch.
In another embodiment of the invention, the second etch is performed more deeply than the first etch. Accordingly, the reflecting surface is taller than the side of the ridge.


REFERENCES:
patent: 4618210 (1986-10-01), Kondo
patent: 4747654 (1988-05-01), Yi-Yan
patent: 4813757 (1989-03-01), Sakano et al.
patent: 4846542 (1989-07-01), Okayama
patent: 5002350 (1991-03-01), Dragone
patent: 5013113 (1991-05-01), Soref
patent: 5039993 (1991-08-01), Dragone
patent: 5182787 (1993-01-01), Blonder et al.
patent: 5243672 (1993-09-01), Dragone
patent: 5253319 (1993-10-01), Bhagavatula
patent: 5263111 (1993-11-01), Nurse et al.
patent: 5391869 (1995-02-01), Ade et al.
patent: 5412744 (1995-05-01), Dragone
patent: 5450511 (1995-09-01), Dragone
patent: 5467418 (1995-11-01), Dragone
patent: 5581643 (1996-12-01), Wu
patent: 5706374 (1998-01-01), Vinchant
patent: 5706377 (1998-01-01), Li
patent: 5786925 (1998-07-01), Goossen et al.
patent: 5841931 (1998-11-01), Foresi et al.
patent: 5938811 (1999-08-01), Greene
patent: 6108478 (2000-08-01), Harpon et al.
patent: 6118909 (2000-09-01), Chen et al.
patent: 0647861 (1995-04-01), None
patent: 0985942 (2000-03-01), None
patent: 63-197923 (1988-08-01), None
patent: 2-179621 (1990-07-01), None
patent: 6-186598 (1994-07-01), None
Ahmad, et al.,Ultracompact Corner-Mirrors and T-Branches in Silicon-on-Insulator, IEEE Photonics Technology Letters, vol. 14, No. 1, Jan. 2002, pp. 65-67.
Appleman, et al.,Self-Aligned Chemically Assisted Ion-Beam-Etched GaAs/(AI,Ga)As Turning Mirrors for Photonic Applications, Journal of Lightwave TEchnology, vol. 8, No. 1, Jan. 1990, pp. 39-41.
Faustini, et al, Loss Analysis and Interference Effect in Semiconductor Integrated Waveguide Turning Mirrors, IEEE Photonics Technology Letters, vol. 8, No. 10, Oct. 1996, pp. 1355-1357.
Johnson, et al,Precise Determination of Turning Mirror Loss Using GaAs/AIGaAs Lasers with Up to Ten 90° Intracavity Turning Mirrors, IEEE Photonics Technology Letters, vol. 4, No. 1, Jan. 1992, pp. 24-26.
Pennings, et al.,Integrated-Optic Versus Microoptic Devices for Fiber-Optic Telecommunication Systems: A Comparison, IEEE Journal of Selected Topics in Quantum Electronics, vol. 2, No. 2, Jun. 1996, pp. 151-164.
Studenkov, et al.,Efficient Coupling in Integrated Twin-Waveguide Lasers Using Waveguide Tapers, IEEE Photonics Technology Letters, vol. 11, No. 9, Jan. 1999, pp. 1096-1098.
Tang, et al.,Integrated Waveguide Turning Mirror in Silicon-on-Insulator, IEEE Photonics Technology Letters, vol. 14, No. 1, Jan. 2002, pp. 68-70.
Abe, et al.,Optical Path Length Trimming Technique using Thin Film Heaters for Silica-Based Waveguides on Si, Electronics Letters, Sep. 12, 1996, vol. 32-No. 19, pp. 1818-1820.
Albert, J.,Planar Fresnel Lens Photoimprinted in a Germanium-Doped Silica Optical Waveguide, Optics Letters, May 15, 1995, vol. 20-No. 10, pp. 1136-1138.
Aman, M.C.,Calculation of Metal-Clad Ridge-Waveguide(MCRW)Laser Modes by Mode Coupling Technique, Journal of Lightwave Technology, vol. LT-4, No. 6, Jun. 1986, pp. 689-693.
Amann, M.C. et al,Calculation Of The Effective Refractive-Index Step For The Metal-Cladded-Ridge-Waveguide Laser, Applied Optics, vol. 20, No. 8, Apr. 15, 1981, pp. 1483-1486.
Baba, S. et al.,A Novel Integrated-Twin-Guide(ITG)Optical Switch with a Built-in TIR Region; IEEE Photonics Technology Letters; vol. 4, No. 5, May 1992, pp. 486-488.
Benson, T.M.,Etched-Wall Bent-Guide Structure for Integrated Optics in the III-V Semiconductors; Journal of Lightwave Technology, vol. LT-2, No. 1, Feb. 1984; pp. 31-34.
Berry, G.M. et al.,Analysis Of Multiplayer Semiconductor Rib Waveguides With High Refractive Index Substrates, Electronics Letters; vol. 29, No. 22; Oct. 28, 1993, pp. 1941-1942.
Betty, I. et al.,A Robust, Low-Crosstalk, InGaAsP/InP Total-Internal Reflection Switch For Optical Cross-Connect Application.
Burke, S.V.,Spectral Index Method Applied to Coupled Rib Waveguides; Electronics Letters, vol. 25, No. 9, Apr. 27, 1989, pp. 605-606.
Burns, W.K. et al.,Mode Conversion in Planar-Dielectric Separating Waveguides; IEEE Journal of Quantum Electronics, vol. QE-11, No. 1, Jan. 1975; pp. 32-39.
Cai, Y. et al.,A Novel Three-Guide Optical Coupler Using A Taper-Formed Waveguide; j. Appl. Phys 69(5), Mar. 1991; pp. 2810-2814.
Cavailles, J.A. et al.,First Digital Optical Switch Based on InP/GaInAsP Double Heterostructure Waveguides; Electronics Letters, vol. 27, No. 9, Apr. 25, 1991, pp. 699-700.
Chen, R.T. et al.,Design and Manufacturing of WDM Devices; Proceedings of SPIE vol. 3234.
Clemens, et al.,Wavelength-Adaptable Optical Phased Array in SiO2-Si, Photonics Technology Letters, Oct. 1995, vol. 7-No. 10, 1040-1041.
Dagli, N. et al.,Analysis of Rib Dielectric Waveguides; IEEE Journal of Quantum Electronics, vol. QE-21, No. 4, Apr. 1985, pp. 315-321.
Dagli, N. et al.,Theoretical and Experimental Study of the Analysis and Modeling of Integrated Optic

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