Foreign substance inspecting system including a calibration stan

Details Foreign substance inspecting system including a calibration stan Foreign substance inspecting system including a calibration stan

1987-11-12

1988-10-11

McGraw, Vincent P.

Optics: measuring and testing

Standard

356237, G01N 2188

Patent

active

047766930

ABSTRACT:
A system for placing thereron an object to be inspected, scanning the surface of the object to be inspected by a light spot and inspecting a foreign substance on the basis of light information produced by the foreign substance on the surface of the object to be inspected includes light information producing means including a member for producing light information substantially similar to the light information produced by the foreign substance, and means for disposing the member on a surface substantially identical to the surface of the object to be inspected placed on the system.

REFERENCES:
patent: 4386850 (1983-06-01), Leahy
patent: 4468120 (1984-08-01), Tanimoto et al.
"Design of a Pattern on a Photomask-Like Physical Standard for Evaluation and Calibration of Linewidth-Measuring Systems", SWYT, Solid State Technology, 1-1978, pp. 35-42.

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