Foreign substance inspecting apparatus and method thereof

Details Foreign substance inspecting apparatus and method thereof Foreign substance inspecting apparatus and method thereof

1997-07-08

1999-01-05

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

G01N 2188

Patent

active

058568689

ABSTRACT:
A foreign substance inspecting apparatus and method for detecting a foreign substance on a surface, includes a light source for providing light; a plurality of condensing optical systems for collecting the light from the light source and for forming a plurality of light spots on the surface; a scanning system for scanning the surface using the light spots formed by the condensing optical systems; a detecting optical system for detecting light scattered from at least one of the light spots by the foreign substance on the surface; and a surface shape measuring system for measuring a shape of the surface, wherein a focus of each one of the condensing optical systems is individually adjusted according to the surface shape measured by the surface shape measuring system.

REFERENCES:
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 5017798 (1991-05-01), Murakami et al.
patent: 5528360 (1996-06-01), Kohno

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