Foreign substance inspecting apparatus

Details Foreign substance inspecting apparatus Foreign substance inspecting apparatus

1982-01-28

1984-08-28

Sikes, William L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250563, 250572, 356239, G01N 2100

Patent

active

044681208

ABSTRACT:
An apparatus for detecting the presence of a foreign substance adhering to a planar substrate comprises irradiating means capable of emitting a light beam incident on one surface of the substrate obliquely relative to the surface, means for displacing the irradiating means and the substrate relative to each other so that the position of incidence of the light beam onto the substrate is scanned on said one surface, metering means capable of receiving a plurality of irregular reflected light beams of the light beam which have been irregularly reflected on said surface toward different directions and producing a plurality of electrical outputs corresponding to the intensity of light of the plurality of irregular reflected light beams, and means for deciding the presence of the foreign substance on the basis of the plurality of electrical outputs.

REFERENCES:
patent: 3814946 (1974-06-01), Takahashi et al.
patent: 3879131 (1975-04-01), Cuthbert et al.
patent: 3984189 (1976-10-01), Seki et al.

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