Foreign particle inspection apparatus

Details Foreign particle inspection apparatus Foreign particle inspection apparatus

1992-11-20

1994-11-15

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

250572, G01N 2132

Patent

active

053653300

ABSTRACT:
An apparatus for inspecting a foreign particle on an object to be inspected comprises a radiating device for radiating a light beam toward a surface to be inspected, which is at least one of a surface of a protection film supported by a frame member and a surface of a substrate provided with the protection film, a light receiving device for receiving light from the surface to be inspected to output a photoelectric signal, a detecting device for detecting the foreign particle based on the signal of the light receiving device, and an inspection area determining device for determining an inspection area on the surface to be inspected in accordance with an optical property of at least one of the frame member and the protection film.

REFERENCES:
patent: 4669875 (1987-06-01), Shiba et al.
patent: 4886975 (1989-12-01), Murakami et al.
patent: 4889998 (1989-12-01), Hayano et al.
patent: 4922308 (1990-05-01), Noguchi et al.

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