Foreign particle inspecting system

Details Foreign particle inspecting system Foreign particle inspecting system

1995-06-26

1996-12-17

Epps, Georgia Y.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356445, 356337, 356345, H05B 3700

Patent

active

055859186

ABSTRACT:
An inspecting system includes a light source, an irradiating optical system for irradiating a surface of an object such as a reticle or photomask with light from the light source, a detection optical system for detecting scattered light from the surface of the object, and a light blocking device provided substantially parallel to the surface of the object, the light blocking device having a first light transmitting portion for passing light coming from the light source toward the surface of the object and a second light transmitting portion for passing light coming from an irradiated position on the surface of the object toward the detection optical system.

REFERENCES:
patent: 5041726 (1991-08-01), Chang et al.
patent: 5270794 (1993-12-01), Tsuji et al.
patent: 5416594 (1995-06-01), Gross et al.
patent: 5465145 (1995-11-01), Nakashige et al.

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