Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1995-12-19
1997-07-08
Font, Frank
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356239, G01N 2100
Patent
active
056467257
ABSTRACT:
An apparatus for optically inspecting foreign matter attached to a surface of a substrate on which a pattern is formed, includes an optical scan device for forming an arcuated optical scan line by scanning illumination light on the surface of the substrate, a moving device for moving the substrate relative to the optical scan line in a predetermined direction, a light-receiving device for receiving scattered light from the foreign matter attached to the surface of the substrate, and outputting an electrical signal corresponding to the intensity of the scattered light, and a signal processing device for detecting the foreign matter on the basis of the electrical signal from the light-receiving device.
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patent: 4943734 (1990-07-01), Johnson et al.
patent: 5043589 (1991-08-01), Smedt et al.
patent: 5317380 (1994-05-01), Allemand
Font Frank
Nikon Corporation
Stafira Michael P.
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