Forceps for semiconductor silicon wafer

Details Forceps for semiconductor silicon wafer Forceps for semiconductor silicon wafer

1987-03-25

1988-08-30

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

285261, 285390, 285397, 403 90, 403299, B25B 1100, B25J 1506, H01L 2168

Patent

active

047671424

ABSTRACT:
A vacuum-forceps is disclosed. A valve chamber is provided between a first suction passage communicating with an adsorptive member and a second suction passage connected through a suction tube to a vacuum source. A valve member linked to an operating push button is accomodated in the valve chamber. The adsorptive member is rotatable and swayable relative to a forceps body with the aid of a spherical member. A suction tube is connected through a double-coupling to the forceps body. A bypass is provided between the valve chamber and the first suction passage. A semiconductor silicon wafer is adsorbed on an adsorptive plate provided at the tip end of the adsorptive member by actuating the push button and is then moved to a desired position.

REFERENCES:
patent: 954927 (1910-04-01), Burdick
patent: 982661 (1911-01-01), Dickens
patent: 1302028 (1919-04-01), Fuchs et al.
patent: 1337427 (1920-04-01), Beach
patent: 1743212 (1930-01-01), Harris
patent: 3335727 (1967-08-01), Spoto
IBM Technical Disclosure Bulletin, vol. 24, No. 6, Nov. 1981, "Vacuum Wafer Pick-Up Tip", by Ferrentino et al.

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