Forced-convection, liquid-cooled, microchannel heat sinks

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357 55, 357 81, H01L 2504

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048947091

ABSTRACT:
A microchannel heat sink used to cool a high power electronic device such as an integrated circuit comprising a plurality of channels in close thermal contact to the integrated circuit and through which a liquid is passed to create either a developing laminar flow or a turbulent flow. The turbulent flow may be either developing or fully developed. The heat sink features a compensation heater surrounding the integrated circuit and heated at the same rate as the integrated circuit to thereby provide a more uniform temperature at the perimeter of the integrated circuit.

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Tuckerman et al, "Micro-Capillary Thermal Interface Technology for VLSI Packaging," Symposium on VLSI Technology, Digest of Technical Papers, 1983, pp. 60-61.
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