Forced air cooling of components on a probecard

Details Forced air cooling of components on a probecard Forced air cooling of components on a probecard

2006-12-14

2009-06-02

Nguyen, Vinh P (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754090

Reexamination Certificate

active

07541824

ABSTRACT:
A probe card with an air channel over the active components for cooling the active components on the probe card is provided.

REFERENCES:
patent: 5198753 (1993-03-01), Hamburgen
patent: 5521523 (1996-05-01), Kimura et al.
patent: 5834946 (1998-11-01), Albrow et al.

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