Force transducer

Details Force transducer Force transducer

1988-07-27

1989-05-30

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

388 5, G01L 118, H01C 1010

Patent

active

048339296

ABSTRACT:
A force transducer for detecting compression. The force transducer comprises an Si single crystal so formed as to have a crystal face of {110} as the surface to which compression is applied; a first pair of opposing electrodes provided on the Si single crystal in the direction having an angle of 45 degrees with the direction of <001> of the Si single crystal and a second pair of opposing electrodes provided on the Si single crystal in the direction having an angle of 45 degrees with the direction of <110> of the Si single crystal; a seat which is bonded to the crystal face of {110} of the Si single crystal and which transmits the compression substantially uniformly to the crystal face; and a base which is bonded to the surface of the Si single crystal opposite to the surface bonded with the seat and which supports the Si single crystal. The force transducer has a simple structure as a whole and is capable of detecting compression with accuracy.

REFERENCES:
patent: 3145563 (1964-08-01), Hollander, Jr.
patent: 3149488 (1964-09-01), Castro
patent: 3251222 (1966-05-01), Fenner
patent: 4406992 (1983-09-01), Kurtz et al.
Journal of Applied Physics, vol. 32, No. 10, Oct. 1961, pp. 2008-2019, W. G. Peann et al., "Semiconducting Stress Transducers . . . ".

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