Force transducer

Details Force transducer Force transducer

1992-12-23

1994-08-30

Chilcot, Jr., Richard E.

Measuring and testing

Dynamometers

Responsive to force

73777, 73862621, G01L 116

Patent

active

053416880

ABSTRACT:
A force transducer comprises: an N-type silicon single crystal having a crystal face of (110) on which a force is applied; a pair of first electrodes and a pair of second electrodes mounted on the crystal face of (110) of the N-type silicon single crystal, the first electrodes facing in a direction angularly spaced by 135 degrees from a direction of <001> of the crystal, and the second electrodes being angularly spaced by 90 degrees from the first electrodes, one of the pairs of first and second electrodes being adapted to serve as input electrodes and the other being adapted to serve as output electrodes; a force transmission block connected to the crystal face of (110) of the N-type silicon single crystal for transmitting the force perpendicularly to the crystal face; and a support bed supporting the N-type silicon single crystal and connected to the N-type silicon single crystal at a face opposite to the crystal face to which the force transmission block is connected, the support bed being in the form of a planar structure having a horizontal cross-sectional shape with a short axis and a long axis.

REFERENCES:
patent: 4071838 (1978-01-01), Block
patent: 4833929 (1989-05-01), Omura et al.
patent: 4993266 (1991-02-01), Omura et al.

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