Force sensor with attached mass

Details Force sensor with attached mass Force sensor with attached mass

1986-10-16

1990-01-09

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1508

Patent

active

048919853

ABSTRACT:
A sensor comprising a die having a sensing portion. The sensor further comprises apparatus for enhancing the sensitivity of the sensing portion, the apparatus for enhancing comprising a mass rigidly attached to a portion of the die. The sensor also comprises two mechanical stops. One stop includes a portion of the die, and the other stop is rigidly spaced away from the die. Movement of the mass is limited by the two stops.

REFERENCES:
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patent: 4064763 (1977-12-01), Srinivasan
patent: 4135408 (1979-01-01), Di Giovanni
patent: 4364276 (1982-12-01), Shimazoe et al.
patent: 4430895 (1984-02-01), Colton
patent: 4445384 (1984-05-01), Royer
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4480488 (1984-11-01), Read et al.
patent: 4553436 (1985-11-01), Hansson
Moskalik, "Tensometric Accelerometers with Overload Protection", Meas. Tech., vol. 22, No. 12, (Dec. 1979), pp. 1469-1471.
Roylance et al., "A Batch-Fabricated Silicon Accelerometer", IEEE Trans. on Electron Devices, vol. ED-26, No. 12 (Dec. 1979), pp. 1911-1917.

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