Force sensor device

Details Force sensor device Force sensor device

1997-04-28

1998-11-10

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7386259, 73DIG1, 280735, G01P 1510

Patent

active

058346465

ABSTRACT:
A force sensor device for sensing seismic force due to changes in acceleration or pressure, comprising mass-spring system formed by a resonant flexible plate forming system mass and suspended from a rigid frame by means of at least two beams forming system springs and located at different sides of the plate, the plate, frame and beams being made of a silicon. A vibration excitation device upon application of electric signals at an elected one of a plurality of specific frequencies interacts with the plate to create a corresponding specific vibration mode therein, and a detection device detects any vibration frequency change in the plate due to interaction between a stress field thereon caused by the seismic force and a stress field thereon caused by the vibration mode.

REFERENCES:
patent: 4567441 (1986-01-01), Greenwood
patent: 4945773 (1990-08-01), Sickafus
patent: 5090254 (1992-02-01), Guckel et al.

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