Force sensor chip

Details Force sensor chip Force sensor chip

2007-07-31

2009-02-17

Thompson, Jewel (Department: 2855)

Measuring and testing

Dynamometers

Responsive to force

Reexamination Certificate

active

07490524

ABSTRACT:
In a force sensor chip, a base member, to which an external force is applied, includes: an operating part provided in a central portion of the base member and having an external-force acting area section; a supporting part provided, in an outer peripheral portion of the base member, for supporting the operating part; an intermediate part provided between the operating part and the supporting part; a first connecting arm section connecting the operating part and the intermediate section; a second connecting arm section connecting the intermediate part and the supporting part; and at least one strain resistance element provided on each of respective deformation-generating portions of the first and the second connecting arm sections.

REFERENCES:
patent: 6951142 (2005-10-01), Ohsato et al.
patent: 2003-207405 (2003-07-01), None
U.S. Appl. No. 11/889,438.

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