Force sensor

Measuring and testing – Dynamometers – Responsive to force

Reexamination Certificate

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Details

C073S862625, C073S862636, C073S862622, C073S514350, C977S724000, C977S953000, C977S956000

Reexamination Certificate

active

07404338

ABSTRACT:
The resolution and the signal-to-noise ration of known force sensors as e.g. capacitive force sensors decrease when scaling them down. To solve this problem there is a solution presented by the usage of a nanostructure as e.g. a carbon nanotube, which is mechanically deformed by a force to be measured. The proposed force sensors comprises a support with two arms carrying the carbon nanotube. The main advantage of this nanoscale force sensor is a very high sensitivity as the conductance of carbon nanotubes changes several orders of magnitude when a mechanical deformation arises.

REFERENCES:
patent: 2002/0167374 (2002-11-01), Hunt et al.
J. Chung, J. Lee. “Nanoscale gap fabrication and integration of carbon nanotubes by micromachining.” Sensors and Actuators A. 104 (2003) pp. 229-235.
A. Husain, J. Hone, Henk W. Ch. Postma, X. M. Huang, T. Drake, M. Barbic, A. Scherer, and M.L. Roukes. “Nanowire-based very-high-frequency electromechanical resonator.” Applied Physics Letters. V. 83, No. 6 (2003) pp. 1240-1242.
Minot et al. (E.D. Minot, Y. Yuaish, V. Sazonova, J-Y. Park, M. Brink, P. L. McEuen. “Tuning Carbon Nanotube Band Gaps with Strain.” Phys. Rev. Lett. 90 156401 (2003) pp. 1-4).
Tombler et al.: “Reversible electromechanical characteristics of carbon nanotubes under local-probe manipulation”, Nature, Jun. 15, 2000.
Husain et al.: “Nanowire-based very-high-frequency electromechanical resonator”, Applied Physics letters, Aug. 11, 2003.
Toriyama Toshiyuki et al.: “Piezoresistance measurement on single crystal silicon nanowires”, Journal of Applied Physics, Jan. 1, 2003.

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