Force sensing integrated readout and active tip based probe...

Details Force sensing integrated readout and active tip based probe... Force sensing integrated readout and active tip based probe...

2006-04-06

2009-06-30

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

07552625

ABSTRACT:
In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

REFERENCES:
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5245863 (1993-09-01), Kajimura et al.
patent: 5260567 (1993-11-01), Kuroda et al.
patent: 5465611 (1995-11-01), Ruf et al.
patent: 5689107 (1997-11-01), Hsu
patent: 5908981 (1999-06-01), Atalar et al.
patent: 6310990 (2001-10-01), Putnam et al.
patent: 6567572 (2003-05-01), Degertekin et al.
patent: 2004/0130728 (2004-07-01), Degertekin et al.
U.S. Appl. No. 11/352,535, filed Feb. 13, 2006.
U.S. Appl. No. 11/405,051, filed Apr. 17, 2006.
U.S. Appl. No. 11/297,097, filed Dec. 8, 2005.
U.S. Appl. No. 11/260,238, filed Oct. 28, 2005.
U.S. Appl. No. 11/476,625, filed Jun. 29, 2006.
U.S. Appl. No. 11/548,005, filed Oct. 10, 2006.
U.S. Appl. No. 11/548,531, filed Oct. 11, 2006.
U.S. Appl. No. 11/552,274, filed Oct. 24, 2006.

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