Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-06-29
2008-11-04
Kwok, Helen C. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504140
Reexamination Certificate
active
07444868
ABSTRACT:
MEMS devices and methods employing one or more electrodes coupled to a time-varying rebalancing voltage are disclosed. A MEMS inertial sensor in accordance with an illustrative embodiment can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, and one or more torquer electrodes. Rebalancing voltages can be applied to the torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. The rebalancing voltages applied to each of the torquer electrodes can be adjusted using feedback from one or more force rebalancing control loops.
REFERENCES:
patent: 5473945 (1995-12-01), Grieff et al.
patent: 5481914 (1996-01-01), Ward
patent: 5555765 (1996-09-01), Greiff
patent: 5600064 (1997-02-01), Ward
patent: 5604309 (1997-02-01), Ward
patent: 5635739 (1997-06-01), Grieff et al.
patent: 5672949 (1997-09-01), Ward
patent: 5747961 (1998-05-01), Ward et al.
patent: 5752410 (1998-05-01), Bernstein
patent: 5767405 (1998-06-01), Bernstein et al.
patent: 5796001 (1998-08-01), Greiff et al.
patent: 5892153 (1999-04-01), Weinberg et al.
patent: 5945599 (1999-08-01), Fujiyoshi et al.
patent: 5955668 (1999-09-01), Hsu et al.
patent: 5992233 (1999-11-01), Clark
patent: 6067858 (2000-05-01), Clark et al.
patent: 6164134 (2000-12-01), Cargille
patent: 6230563 (2001-05-01), Clark et al.
patent: 6250156 (2001-06-01), Seshia et al.
patent: 6311555 (2001-11-01), McCall et al.
patent: 6360601 (2002-03-01), Challoner et al.
patent: 6370937 (2002-04-01), Hsu
patent: 6439050 (2002-08-01), Musalem et al.
patent: 6445195 (2002-09-01), Ward
patent: 6453743 (2002-09-01), Royle et al.
patent: 6456939 (2002-09-01), McCall et al.
patent: 6481283 (2002-11-01), Cardarelli
patent: 6481285 (2002-11-01), Shkel et al.
patent: 6619121 (2003-09-01), Stewart et al.
patent: 6621279 (2003-09-01), Ward
patent: 6651500 (2003-11-01), Stewart et al.
patent: 6671648 (2003-12-01), McCall et al.
patent: 6674294 (2004-01-01), Ward
patent: 6675630 (2004-01-01), Challoner et al.
patent: 6701786 (2004-03-01), Hulsing, II
patent: 6714025 (2004-03-01), Mohaupt et al.
patent: 6715353 (2004-04-01), Johnson
patent: 6718823 (2004-04-01), Platt
patent: 6792802 (2004-09-01), Platt
patent: 6841992 (2005-01-01), Yue et al.
patent: 7036373 (2006-05-01), Johnson et al.
patent: 7213458 (2007-05-01), Weber et al.
patent: 2002/0020219 (2002-02-01), DeRoo et al.
patent: 2002/0190607 (2002-12-01), Paden et al.
patent: 2003/0033850 (2003-02-01), Challoner et al.
patent: 2003/0084722 (2003-05-01), Kim et al.
patent: 2003/0216884 (2003-11-01), Cardarelli
patent: 2005/0104756 (2005-05-01), Tazartes et al.
patent: 0895059 (1999-02-01), None
Black Lowe & Graham PLLC
Honeywell International , Inc.
Kwok Helen C.
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