Force method for determining the spring constant of scanning...

Details Force method for determining the spring constant of scanning... Force method for determining the spring constant of scanning...

2008-07-08

2008-07-08

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

11458017

ABSTRACT:
In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.

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patent: WO 2004/104516 (2004-12-01), None

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