Force meter with optical waveguide integrated in a substrate

Details Force meter with optical waveguide integrated in a substrate Force meter with optical waveguide integrated in a substrate

1989-09-21

1991-01-15

Lee, John D.

350 9614, G02B 612

Patent

active

049848631

ABSTRACT:
An optical waveguide force meter for the measurement of forces or stresses integrated on a single substrate, including: a single-mode transducer waveguide supporting only the stresses which are applied through the intermediate portion of an upper plate of the force meter; a coupling/mixing grating having N focussing concave gratings provided adjacent an exit end of the optical waveguide; N detectors arranged at each of the N focussing points of waves defracted by the coupling/mixing grating; N TM polarization filters arranged respectively between each concave grating and each detector; and a single-mode laser source. The waveguide, coupling/mixing grating and polarization filters are all provided on the single substrate. The single-mode laser source and detectors are supported by the substrate and by an underlying base plate member.

REFERENCES:
patent: 4253060 (1981-02-01), Chen
patent: 4773063 (1988-09-01), Hunsperger et al.
patent: 4861128 (1989-08-01), Ishikawa et al.
IBM Technical Disclosure Bulletin, No. 2, vol. 24, Jul. 1981, pp. 893-894, H. Korth, "Integrated Optical Force and Stress Sensor".

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