Force generator for electrostrictive actuators

Details Force generator for electrostrictive actuators Force generator for electrostrictive actuators

1994-11-04

1996-02-20

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310366, H01L 4108

Patent

active

054931657

ABSTRACT:
This disclosure describes a method for producing high-performance layered-element electrostrictive or piezoelectric actuators, and the resulting product. The process calls for steps that minimize decreases of the stack stiffness which usually characterize layered wafer actuators. These include making the wafers flat and parallel, using a referred wafer metalization process that does not affect wafer surface roughness, and using stock-bonding epoxies with viscosities which readily permit the bonding agent to "wick" into the interface areas of the wafer/electrode stacks thereby to minimize the bond agent thickness.

REFERENCES:
patent: 3521090 (1970-07-01), Angeloff
patent: 4618797 (1986-10-01), Cline
patent: 4680595 (1987-07-01), Cruz-Uribe et al.
patent: 4761582 (1988-08-01), McKee
patent: 4978881 (1990-12-01), Wakita et al.
patent: 5271133 (1993-12-01), Dam et al.

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