Measuring and testing – Dynamometers – Responsive to multiple loads or load components
Patent
1999-08-16
2000-12-12
Noori, Max
Measuring and testing
Dynamometers
Responsive to multiple loads or load components
G01D 700
Patent
active
061582913
ABSTRACT:
An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
REFERENCES:
patent: 3509583 (1970-05-01), Fraioli
patent: 3952234 (1976-04-01), Birchall
patent: 4175428 (1979-11-01), Eilersen
patent: 4261086 (1981-04-01), Giachino et al.
patent: 4373394 (1983-02-01), Beloglazov et al.
patent: 4373399 (1983-02-01), Beldglazov et al.
patent: 4384899 (1983-05-01), Myers
patent: 4454771 (1984-06-01), Shimazoe et al.
patent: 4542436 (1985-09-01), Carusillo
patent: 4552028 (1985-11-01), Burckhardt et al.
patent: 4586109 (1986-04-01), Peters et al.
patent: 4615105 (1986-10-01), Wada et al.
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4719538 (1988-01-01), Cox
patent: 4853894 (1989-08-01), Yamanaka et al.
patent: 4855866 (1989-08-01), Imamura et al.
patent: 4864463 (1989-09-01), Shkedi
patent: 4891985 (1990-01-01), Glenn
patent: 4905523 (1990-03-01), Okada
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 4967605 (1990-11-01), Okada
patent: 4969366 (1990-11-01), Okada
patent: 5014415 (1991-05-01), Okada
patent: 5035148 (1991-07-01), Okada
patent: 5054323 (1991-10-01), Hubbard, Jr. et al.
patent: 5092645 (1992-03-01), Okada
patent: 5182515 (1993-01-01), Okada
patent: 5263375 (1993-11-01), Okada
patent: 5295386 (1994-03-01), Okada
patent: 5317922 (1994-06-01), Bomback et al.
patent: 5343765 (1994-09-01), Okada
patent: 5365799 (1994-11-01), Okada
patent: 5392658 (1995-02-01), Okada
patent: 5406848 (1995-04-01), Okada
patent: 5421213 (1995-06-01), Okada
patent: 5437196 (1995-08-01), Okada
patent: 5492020 (1996-02-01), Okada
patent: 5497668 (1996-03-01), Okada
patent: 5531002 (1996-07-01), Okada
patent: 5531092 (1996-07-01), Okada
patent: 5571972 (1996-11-01), Okada
patent: 5639973 (1997-06-01), Okada
patent: 5646346 (1997-07-01), Okada
patent: 5661235 (1997-08-01), Bonin
patent: 5668318 (1997-09-01), Okada
patent: 5682000 (1997-10-01), Okada
patent: 5744718 (1998-04-01), Okada
patent: 5780749 (1998-07-01), Okada
patent: 5786997 (1998-07-01), Hoyt et al.
patent: 5811693 (1998-09-01), Okada
patent: 5831163 (1998-11-01), Okada
patent: 5850040 (1998-12-01), Okada
patent: 5856620 (1999-01-01), Okada
Patent Abstracts of Japan of JP 3050809 dated May 16, 1991 vol. 15 No. 101.
Patent Abstract of Japan of JP 3165552 dated Oct. 16, 1991 vol. 15, No. 405.
R.F. Wolffenbuttel et al. "Multiaxis Compliant Capacitive . . . " IEEE Instrumentation and Measurement Technology Conference San Jose, California, 1990, pp. 54-59.
Patent Abstracts of Japan, vol. 014, No. 366 (P-1089) Aug., 1990.
Patent Abstracts of Japan, vol. 013, No. 266 (P-887) Jun. 20, 1989.
Patent Abstracts of Japan, vol. 010, No. 177 (p-470) Jun. 21, 1986.
Patent Abstracts of Japan, vol. 015, no. 311 (E-1098) Aug., 1991.
Patent Abstracts of Japan, vol. 012, No. 351 (E-660), Sep. 20, 1988, JP 63108763A.
Patent Abstracts of Japan, vol. 013, No. 410(E-819), Sep. 11, 1989, for JP 01150383A.
Patent Abstracts of Japan, vol. 011, No. 179 (E-514), Jun. 9, 1987, for JP 62011257A.
Patent Abstracts of Japan, vol. 10, No. 45, Feb. 21, 1986, p. 430.
Patent Abstracts of Japan, vol. 7, No. 38, Feb. 16, 1983, p.176.
Patent Abstracts of Japan, vol. 10, No. 256, Sep. 2, 1986, p. 493.
Patent Abstracts of Japan, vol. 11, No. 58, Feb. 21, 1987, p. 550.
Patent Abstracts of Japan, vol. 9, No. 6, Jan. 11, 1985.
N.T.I.S. Technical Notes, "Force Sensor . . . ", Part F, Feb. 1986, p. 188.
Peterson, K., Transducers '85, International Conference on Solid-State Sensors an Actuators, "A force sensing chip . . . ", 1985, pp.30-32.
Suzuki, M. et al., Proceedings.
IECON '86, International Conference on Industrial Electronics, Control and Instrumentation, "Three Kinds of Dexterous . . . ", Milwaukee, Wis., pp. 544-548.
Noori Max
Thompson Jewel Y.
LandOfFree
Force detector and acceleration detector does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Force detector and acceleration detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Force detector and acceleration detector will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-206165