Force detecting device

Electrical resistors – Strain gauge type

Patent

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Details

338 5, G01L 122

Patent

active

048497304

ABSTRACT:
A force detecting device includes an insulative strain element, strain sensors, and leads. The insulative strain element is electrically insulative at least at its surface. The strain sensors are formed of a piezoresistive thin film and deposited as a piezoresistive thin film pattern on the surface of the insulative strain element integrally therewith. The leads are formed of a highly conductive thin film and deposited as a highly conductive thin film pattern on the surface of the insulative strain element integrally therewith.

REFERENCES:
patent: 4689600 (1987-08-01), Wilner

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