Force delivery system for improved precision membrane probe

Details Force delivery system for improved precision membrane probe Force delivery system for improved precision membrane probe

1988-09-23

1990-12-25

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158F, G01R 106

Patent

active

049806378

ABSTRACT:
Disclosed is a test probe [10] for testing a test device [not shown], also known as a device under test, while precisely controlling the force exerted by the test probe [10] on the test device. Included is a translation ring [18] as well as a carrier [12] formed to have at least a first side and a second side. The support means [12] is coupled to the translation ring [18]. Also included is at least one flexure pivot [14] for delivering a force to a test device; the flexure pivot [14] is coupled to the first side of the carrier. A membrane [16] is coupled to the second side of the carrier. Finally, at least one signal contact bump [24] is mounted on the membrane [16] for communicating an electric current between the test probe [10] and the test device [not shown].

REFERENCES:
patent: 4636722 (1987-01-01), Ardezzone
patent: 4758785 (1988-07-01), Rath

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