Following stage planar motor

Details Following stage planar motor Following stage planar motor

2005-08-09

2005-08-09

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S013000, C310S015000

Reexamination Certificate

active

06927505

ABSTRACT:
In electric motor assemblies, separating the x and y coils may achieve significant advantages. An advantageous design includes pairs of interacting magnet array/coil arrays. Separated coil arrays are provided, with a coil array on an arm connected to a following stage, and another coil array on a stage base (the stage being one to which is attached magnet arrays). Positioning devices, moving magnet motor assemblies, moving coil motor assemblies, and methods of driving a stage are provided. By differential driving and creation of torques about the x and y axes, a stage may be driven in six independent degrees of freedom.

REFERENCES:
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patent: 6262796 (2001-07-01), Loopstra et al.
patent: 6552449 (2003-04-01), Tsuboi
patent: 2000-106340 (2000-04-01), None
patent: WO 01/18944 (2001-03-01), None

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