Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1997-10-07
1999-05-25
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356360, 359370, G01B 902
Patent
active
059074000
ABSTRACT:
A low-magnification interference microscope objective is rendered parfocal with a high-magnification objective by folding the light beam to the side of the optical axis of the objective, thereby maintaining the original optical path length while shortening the mechanical length of the objective. The beam is reflected by a mirror, causing it to travel some distance out to the side, and then it is reflected back toward the beamsplitter by an additional pair of mirrors. After a final reflection within the beamsplitter, the resulting beam is coaxial with the original optical axis, while the physical length of the objective has been substantially reduced. This approach makes it possible to obtain a desired distance from the mounting shoulder of the objective to the focal point.
REFERENCES:
patent: 4884880 (1989-12-01), Lictman et al.
patent: 4983042 (1991-01-01), Korner et al.
Durando Antonio R.
Turner Samuel A.
Veeco Corporation
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