Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2008-02-28
2011-12-13
Johnston, Phillip A (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492200, C355S030000
Reexamination Certificate
active
08076659
ABSTRACT:
An extreme ultraviolet (EUV) light source device and foil trap, the device including a vessel; an EUV radiating species supply means that feeds an extreme ultraviolet radiating species into the vessel; a discharge part with discharge electrodes that heat and excite the EUV radiating species and generate a high-temperature plasma; a collector mirror collecting EUV radiation emitted from the plasma; the foil trap installed between the discharge part and the mirror; an extractor part extracting the collected radiation; and an evacuation means exhausting and regulating pressure within the vessel. The foil trap includes foils extending radially from a main axis thereof to capture debris from the light source, while allowing the emitted radiation to pass through a region thereof to the mirror. A length of at least part of the foils in directions parallel to the main axis is shorter in positions close to the main axis than distant therefrom.
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Inoue Takahiro
Shirai Takahiro
Johnston Phillip A
Roberts Mlotkowski Safran & Cole P.C.
Safran David S.
Ushiodenki Kabushiki Kaisha
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