Focusing optics for small spot optical metrology

Details Focusing optics for small spot optical metrology Focusing optics for small spot optical metrology

2007-03-13

2007-03-13

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Of light reflection

With diffusion

C356S237500

Reexamination Certificate

active

10695007

ABSTRACT:
A system for focusing broadband light within a reflectometer includes a concave spherical mirror for gathering light from the surface of a sample under inspection. The concave spherical mirror projects the received light to a convex spherical mirror. The combination of the two mirrors captures the light diverging from the sample and collimates the light into parallel rays. The light can then be passed through an aperture prior to entering a detector. Each of the two mirrors is fabricated as an off-axis section of a spherical mirror and positioned to form a partial Schwarzschild design without the associated problem of a central obscuration.

REFERENCES:
patent: 3524983 (1970-08-01), Voelz
patent: 4205902 (1980-06-01), Shafer
patent: RE32912 (1989-04-01), Doyle
patent: 5106196 (1992-04-01), Brierley
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5661561 (1997-08-01), Wurz et al.
patent: 5917594 (1999-06-01), Norton
patent: 6310687 (2001-10-01), Stumbo et al.
patent: 6778273 (2004-08-01), Norton et al.

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