Focusing method for interferometer

Details Focusing method for interferometer Focusing method for interferometer

1984-12-19

1987-03-31

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

356124, G01B 902

Patent

active

046539239

ABSTRACT:
A focusing method for interferometer wherein a light flux passing through a converter lens for converting the shape of wave fronts is caused to be incident on a tested surface and a testing light beam reflected by the tested surface is caused to be incident on a light receiving element capable of measuring the distribution of intensity of the light at least one-dimensionally. The tested surface is moved in the direction of its center axis until it reaches a position in which the vertex of the tested surface coincides with the focus of the converter lens and the output of the light receiving element shows a peak value, and the tested surface is further moved, from the position referred to hereinabove which serves as a reference position, in the direction of its center axis.

REFERENCES:
patent: 3719421 (1973-03-01), Poilleux et al.
patent: 3740150 (1973-06-01), Munnerlyn

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