Focusing in instruments, such as SEMs and CRTs

Details Focusing in instruments, such as SEMs and CRTs Focusing in instruments, such as SEMs and CRTs

1989-04-03

1990-05-29

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250310, 250307, 358218, H01J 3721

Patent

active

049298364

ABSTRACT:
A significantly improved focusing technique is set forth for use with electron beams, particularly in scanning electron microscopes and/or CRTs. This technique utilizes an in-situ differential signal measurement of an object surface to form a signal which is particularly sensitive to edges in the sample at a superimposed frequency. Perfect focus is obtained when the signal strength at the superimposed frequency is a maximum thereby resulting in a minimum spot size.

REFERENCES:
patent: 3409799 (1968-11-01), Kurzweil et al.
patent: 4804840 (1989-02-01), Ichihashi
patent: 4845362 (1989-07-01), Sicignano et al.

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