Focused ion beam micromilling and articles therefrom

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Details

428 642, 428 644, 428457, 428913, 369283, 369288, B32B 300

Patent

active

057731160

ABSTRACT:
An ultrahigh vacuum focused ion beam micromilling apparatus and process are isclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters.

REFERENCES:
patent: 5401972 (1995-03-01), Talbot et al.
patent: 5402410 (1995-03-01), Yoshimura et al.
patent: 5412210 (1995-05-01), Todokoro et al.
patent: 5453594 (1995-09-01), Koneeny
patent: 5494721 (1996-02-01), Nakagawa et al.

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