Focused ion beam microlathe

Details Focused ion beam microlathe Focused ion beam microlathe

2005-01-04

2005-01-04

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492300

Reexamination Certificate

active

06838683

ABSTRACT:
An apparatus for customizing focused ion beam (FIB) probes is described. Prior to taking probe measurements, the probe tips are milled with a beam of gallium ions on a microlathe platform. A motor rotates the probes such that the probe tips are uniformly milled.

REFERENCES:
patent: 6017590 (2000-01-01), Lindsay et al.
patent: 6303932 (2001-10-01), Hamamura et al.
patent: 6452174 (2002-09-01), Hirose et al.
patent: 20020050565 (2002-05-01), Tokuda et al.
IBM, “Focused Ion Beam Technology,” doc.asweb13.fm.00, Oct. 25, 2002, pp. 1-4, can be accessed at http://www-3.ibm.com/chips/techlib/techlib.nsf/techdocs/.
Fibics, Inc. “Introduction: Focused Ion Beam Systems,” 2003, 1 page, can be accessed at http://www.fibics.com/FIBBasics.html.

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