Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1983-04-07
1986-01-07
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
2504922, H01J 3730, H01J 37317
Patent
active
045635870
ABSTRACT:
Focused ion beam microfabrication column (10) produces an ion beam from ion source (12), focuses the beam by objective lens (24) onto the plane of electrode (36). ExB filter (44) separates out the ion species at a low energy portion of the beam. The beam of selected species is first accelerated by energy central lens (38) which has a controllable potential for controlling the final beam energy to the target. The beam is accelerated by final accelerator lens (54) and is demagnified and focused on the target by that lens. Beam deflector (64) deflects the beam for programmed ion beam work on the target (60).
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patent: 4315153 (1982-02-01), Vahrenkamp
Krohn, "Ion Source of High Brightness Using Liquid Metal," Appl. Phys. Lttrs., 27 (9), 11-1-75, pp. 479-481.
Kendo, "Ion Microprobe with Wein Filter for Primary Ion Mass Separation," Mass Spectroscopy, 22 (3), Sep. 1974, pp. 229-230.
"A High Intensity Scanning Ion Probe with Submicrometer Spot Size," Seliger et al., Appl. Phys. Lett. 34 (5), Mar. 1, 1979.
Seliger Robert L.
Vahrenkamp Richard P.
Wang Victor
Ward J. William
Anderson Bruce C.
Guss Paul A.
Hughes Aircraft Company
Karambelas A. W.
Ogrod Gregory D.
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