Focused ion beam heater thermally tunable laser

Details Focused ion beam heater thermally tunable laser Focused ion beam heater thermally tunable laser

2007-05-29

2007-05-29

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular temperature control

C372S020000

Reexamination Certificate

active

10929860

ABSTRACT:
Platinum (Pt) thin film heaters are deposited by a focused ion beam for semiconductor manufacturing of thermally tunable distributed feedback lasers. An exemplar 1.3 μm InGaAsP/InP laser is integrated with a tuning element having a wide wavelength tuning range of 4.9 nm, that is, 857 GHz, with a small heater current of 13.0 mA.

REFERENCES:
patent: 5536085 (1996-07-01), Li et al.
patent: 2001/0044207 (2001-11-01), Marsh

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