Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1983-07-12
1985-12-03
Smith, Alfred E.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250396R, H01J 3730, H01J 37317
Patent
active
045567980
ABSTRACT:
Two lens focused ion beam column (10) has an accelerating lens (20) which carries a potential to focus an image of the liquid metal ion source (14) on the mass analyzer slit (26) with a magnification of about unity. Munro lens (36) accelerates the beam of selected ion species and demagnifies the image through a long working distance to provide an ion writing spot of less than about 1000 .ANG. size.
REFERENCES:
patent: 3723733 (1973-03-01), Seliger et al.
patent: 3937958 (1976-02-01), Rusch et al.
patent: 4318029 (1982-03-01), Jergenson et al.
patent: 4367429 (1983-01-01), Wany et al.
patent: 4426582 (1984-01-01), Orloff et al.
An Asymmetric Electrostatic Lens for Field-Emission Microprobe Applications; Orloff et al., J. Appl. Phys., 50(4), Apr. 1979, pp. 2494-2501.
Clark Jr. William M.
McKenna Charles M.
Seliger Robert L.
Guss Paul A.
Hughes Aircraft Company
Karambelas A. W.
Ogrod Gregory D.
Sarjeant John A.
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