Focused ION beam apparatus

Details Focused ION beam apparatus Focused ION beam apparatus

2007-07-26

2009-06-23

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S298000, C250S42300F, C250S492200, C250S492220

Reexamination Certificate

active

07550740

ABSTRACT:
A focused ion beam apparatus enables an ion beam to be focused highly accurately on a sample at the beam spot position of the case of the absence of magnetic field without causing isotope separation of the ion beam on the sample, even when there is a magnetic field on the ion beam optical axis or the magnetic field fluctuates. The focused ion beam apparatus comprises a corrective magnetic field generating unit10disposed on the optical axis of the ion beam3for correcting the deflection of the ion beam3due to an external magnetic field. The corrective magnetic field generating unit10includes pole-piece pairs26A and26B, each of which having two pole pieces26aand26bor26cand26dthat are adjacent to each other with a gap d. The pole-piece pairs26A and26B are disposed opposite to each other with a gap g (>d) across the optical axis of the ion beam3. Each of the pole pieces26ato26dis wound with an internal coil29, and the pole-piece pairs26A and26B are each wound with an external coil30in such a manner as to surround the internal coils29.

REFERENCES:
patent: 7105833 (2006-09-01), Brunner et al.
patent: 7411192 (2008-08-01), Takeuchi et al.
patent: 7-296756 (1995-11-01), None
patent: 11-329318 (1999-11-01), None
patent: 11-329320 (1999-11-01), None
patent: 2006-40809 (2006-02-01), None

Affiliated with

Also associated with

Rating

Focused ION beam apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Focused ION beam apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Focused ION beam apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4141041