Radiant energy – With charged particle beam deflection or focussing – With detector
Patent
1992-12-17
1994-07-05
Dzierzynski, Paul M.
Radiant energy
With charged particle beam deflection or focussing
With detector
250299, H01J 37252
Patent
active
053269780
ABSTRACT:
A focused electron-bombarded (FEB) ion detector comprising an MCP, focusing means, and a collection anode disposed in a detector body. The collection anode includes a diode for receiving the focused output electron beam from the MCP. The gain between the input ion current to the MCP and the detector output signal from the diode is on the order of 1-100 million, depending on the device configuration and applied biasing voltages.
REFERENCES:
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patent: 4794296 (1988-12-01), Warde et al.
patent: 4814599 (1989-03-01), Wang
patent: 4825118 (1989-04-01), Kyushima
patent: 4918358 (1990-04-01), Arihara et al.
patent: 5101100 (1992-03-01), Kinoshita et al.
Aebi Verle
Bartz Stephen J.
Costello Kenneth
LaRue Ross A.
Cole Stanley Z.
Dzierzynski Paul M.
Intevac, Inc.
Nguyen Kiet T.
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