Focus tracking system

Details Focus tracking system Focus tracking system

1984-03-29

1986-12-02

McGraw, Vincent P.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 1114

Patent

active

046261036

ABSTRACT:
A method and apparatus are disclosed for tracking the position of surfaces during certain processing such as optical projection printing. Light from a line or point source is made incident on the surface at a small angle to produce interference fringes between the reflected light and a reference beam. Any movement of the surface causes a shifting of the fringe pattern which can be detected by appropriate means such as a slit or grating and photodiode combination.

REFERENCES:
patent: 3819265 (1974-06-01), Feldman et al.
patent: 3884580 (1975-05-01), Webster et al.
patent: 4360273 (1982-11-01), Thaxter
patent: 4395123 (1983-07-01), Minott
patent: 4465366 (1984-08-01), Schmidt
patent: 4498771 (1985-02-01), Makosch et al.
Jenkins and White, Fundamentals of Optics, pp. 241-243, (3d ed 1957).

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