Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Patent
1997-07-17
1999-03-16
Hafiz, Tariq R.
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
702 81, 36446817, 36446816, 36446828, 36446801, 355 53, 355 55, 355 77, 324765, 3561412, 3561521, 414935, 414936, 382145, 382144, 382141, G01N 2101
Patent
active
058842420
ABSTRACT:
A method and system for detecting focus spots. Data from a file created during stepper operation is extracted to get field coordinate position, leveling scheme, and tilt with respect to the x- and y-axes, and wafer height with respect to the focal plane for the multiple fields on the multiple wafers in a production batch. A delta value is calculated for the x- and y-axes tilt data which averages the tilt of each field with its surrounding fields. Delta values are placed in a 3-dimensional data structure linking neighboring fields and corresponding fields on subsequent wafers. Focus spots are detected by the repeated presence of data spikes over the sum of the arithmetic mean and some multiple of the standard deviation of the delta values.
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King Gregory
McMahon Michael
Meier Daniel
Dam Tuan Q.
Hafiz Tariq R.
Micro)n Technology, Inc.
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