Focus detection apparatus having a luminous flux deformation...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

Reexamination Certificate

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Details

Other Related Categories

C250S201400, C359S381000, C359S368000

Type

Reexamination Certificate

Status

active

Patent number

07462805

Description

ABSTRACT:
The present invention provides a focus detection apparatus. In the focus detection apparatus, a luminous flux deformation member is provided to deform a sectional shape of a luminous flux emitted from a light source, and thereby a light quantity difference and a light intensity difference are decreased in light beams which are emitted to a sample surface and received by a photodetector even if objective lenses to be used are differ from each other in a pupil diameter. Consequently, the sample is irradiated with a single spot or multi spots to determine whether or not a focused state is obtained.

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patent: 5483079 (1996-01-01), Yonezawa
patent: 6649893 (2003-11-01), Fujimoto et al.
patent: 2004/0113043 (2004-06-01), Ishikawa et al.
patent: 2005/0122577 (2005-06-01), Fujimoto et al.
patent: 2007/0164194 (2007-07-01), Kurata et al.
patent: 60-042725 (1985-03-01), None
patent: 62-143010 (1987-06-01), None
patent: 05-045573 (1993-02-01), None

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