Focus adjusting method and shape measuring device and interferen

Details Focus adjusting method and shape measuring device and interferen Focus adjusting method and shape measuring device and interferen

1997-09-11

1999-09-21

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356360, G01B 902

Patent

active

059561416

ABSTRACT:
Upon adjusting a focus of an imaging optical system 48 which forms an interference image of an object 44 under inspection produced by an interference optical system 43 and containing information about a shape of the object under inspection onto a given image forming plane at which an image sensing device 49 is arranged, the focus of the imaging optical system 48 with respect to the object 44 under inspection is adjusted by using a singular point obtained from said interference image formed on said image forming plane. Then, the focus of the imaging optical system 48 can be accurately adjusted to a position at which a shape of the object 44 under inspection can be measured precisely with a high reproducibility.

REFERENCES:
patent: 5469259 (1995-11-01), Golby et al.
patent: 5784164 (1998-07-01), Deck et al.

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