Focal point adjustment apparatus and method applied to microscop

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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252014, G02B 704

Patent

active

060434759

ABSTRACT:
A focal point adjustment apparatus applied to an optical apparatus with a projection optical system, comprises, an object lens, a stage on which a plate member on which a subject is put for measurement is placed, provision unit for providing the thickness of the plate member for measurement, determining unit for determining data on the distance between the object lens and the stage on the basis of the thickness of the plate member for measurement provided by the provision unit, and focusing unit for adjusting the distance between the object lens and the stage on the basis of the data on the distance between the object lens and the stage determined by the determining unit.

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