Focal plane adjusted photomask and methods of projecting images

Photocopying – Projection printing and copying cameras – Focus or magnification control

Patent

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Details

355 53, G03B 2752

Patent

active

045374988

ABSTRACT:
In the operation of a projection printer (11) photomasks (22), the patterns (21) of which are protected by coverplates (39), are used interchangeably with other photomasks, the patterns of which are located at an open surface thereof. The photomasks (22) feature shims (46) which space the patterns (21) away from a plane of support surfaces (13) of a mounting chuck (12) by a precise distance equal to the shift of the object plane (14) with respect to an image plane (17) because of the presence of the coverplate (39) in the optical path of the projection printer (11).

REFERENCES:
patent: 3379831 (1983-04-01), Loebach
patent: 3951701 (1976-04-01), Csillag
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4361643 (1982-11-01), Banks et al.
patent: 4390273 (1983-06-01), Loebach

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