Foamed mechanical planarization pads made with supercritical...

Details Foamed mechanical planarization pads made with supercritical... Foamed mechanical planarization pads made with supercritical...

2007-01-23

2007-01-23

Kuhns, Allan R. (Department: 1732)

Plastic and nonmetallic article shaping or treating: processes

Pore forming in situ

By mechanically introducing gas into material

C264S053000

Reexamination Certificate

active

10180408

ABSTRACT:
Foamed thermoplastic polymeric mechanical planarization polishing pads (“MP pads”) made with supercritical fluids are presented. A supercritical fluid foaming agent is dissolved in a thermoplastic polymer. A rapid change in the solubility and volume of the supercritical fluid foaming agent in the thermoplastic polymer results in foaming of the thermoplastic polymer. Foamed thermoplastic polymeric MP pads are advantageously both significantly and uniformly porous.

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Website contents of Trexel, Inc. (http://www.trexel.com) as of Aug. 8, 2002.
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