Foamed mechanical planarization pads made with supercritical...

Plastic article or earthenware shaping or treating: apparatus – With mechanical means forming or expanding pores

Reexamination Certificate

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Details

C425S81700C, C425S144000, C425S149000, C264S051000, C264S052000

Reexamination Certificate

active

07862316

ABSTRACT:
Foamed thermoplastic polymeric mechanical planarization polishing pads (“MP pads”) made with supercritical fluids are presented. A supercritical fluid foaming agent is dissolved in a thermoplastic polymer. A rapid change in the solubility and volume of the supercritical fluid foaming agent in the thermoplastic polymer results in foaming of the thermoplastic polymer. Foamed thermoplastic polymeric MP pads are advantageously both significantly and uniformly porous.

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Website contents of Trexel, Inc. (http://www.trexel.com) as of Aug. 8, 2002.
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