Foam core chuck for the scanning stage of a lithography system

Details Foam core chuck for the scanning stage of a lithography system Foam core chuck for the scanning stage of a lithography system

2006-03-07

2006-03-07

Martin, David (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

C700S060000, C355S075000, C355S077000

Reexamination Certificate

active

07009359

ABSTRACT:
A foam core chuck for use in a scanning stage of a lithography system is disclosed. In accordance with an embodiment of the present invention, the lithography stage includes a frame and a chuck supported by the frame. The chuck has a foam core structure that is covered by a shell layer. An electromagnetic device for supporting and positioning the chuck is coupled to the stage. The electromagnetic device, for example an electromagnetic motor, is coupled to the stage such that at least one coil is coupled to the frame and at least one magnet is coupled to the foam core structure of the chuck. The foam core structure acts as a distributed flexure for the magnet.

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