Fly-eye lens, illumination optical apparatus, and exposure appar

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements

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359623, 359626, G02B 2710

Patent

active

057609632

ABSTRACT:
A fly-eye lens in accordance with the present invention comprises a plurality of lens elements which are arranged in two-dimensionally close contact with each other so as to connect light-entering and light-exit surfaces of the lens elements to each other, while at least three refractive surfaces with a predetermined refractive power are disposed between the light-entering and light-exit surfaces in each of the lens elements. Here, each of the plurality of lens elements has an identical focal length f and, concering a bundle of rays which enters each of the lens elements in parallel to its optical axis with a maximum incident height h.sub.max and then is emitted therefrom with an exit angle .theta..sub.max, substantially satisfies a conditional expression:

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Koji Mori "Stepper Illumination Optical System" Hikari Araiansu, vol. 5, No. 3 1994.
Francis Jenkins & Harvey White; Fundamentals of Optics Fourth Edition; pp. 163-165; 1981.

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