Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2007-01-09
2007-01-09
Cygan, Michael (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
C073S718000, C361S283100, C361S283400
Reexamination Certificate
active
11243978
ABSTRACT:
The present invention provides a highly corrosion-resistant diaphragm pressure sensor capable of obviating the effects of temperature drift that arises when a pressure-travel coefficient changes with temperature of a fluid whose pressure is sensed, and a method of manufacturing the same. A fluororesin thin film diaphragm pressure sensor comprises a pressure sensing element (10, 20) having a pressure receiving part with a deposition electrode formed on each of the opposing faces of sapphire or alumina ceramic diaphragms which are arranged in opposing relation, and a welding portion (10A,20A) on a part of each of the surfaces of the diaphragms; and a fluororesin base (41, 61) for securing the pressure sensing element at the welding portion of the pressure sensing element. The pressure sensing element is coated with a fluororesin thin film having a cross-linked structure, and the pressure sensing element and the fluororesin base are welded together via the fluororesin thin film having a cross-linked structure.
REFERENCES:
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patent: 6640639 (2003-11-01), Okawa
patent: 2006133104 (2006-05-01), None
Akihiro Oshima, et al., “Radiation Induced Crosslinking of Polytetrafluoroethylene”, Radiat. Phys. Chem., vol. 45, pp. 269-273 (1995).
Cygan Michael
Jenkins Jermaine
Tem-Tech Lab. Co., Ltd.
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