Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate
2006-04-11
2006-04-11
Wu, David W. (Department: 1713)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
C526S321000, C526S247000, C430S270100
Reexamination Certificate
active
07026416
ABSTRACT:
To provide a fluoropolymer suitable for use as a base polymer for resist materials for excimer lasers having a wavelength of 250 nm or shorter.A fluoropolymer having a monomer unit formed by cyclopolymerization of a fluorinated diene compound represented by the following formula (3),in-line-formulae description="In-line Formulae" end="lead"?CF2═CFCF2—C(CF3)(R5)—CH2CH═CH2 (3)in-line-formulae description="In-line Formulae" end="tail"?wherein R5is either a hydroxyl group blocked by —CHR7—O—R8or an organic group having the hydroxyl group, and R8is a cyclic saturated hydrocarbon such as a cycloalkyl group which may have a substituent, or an organic group having the cyclic saturated hydrocarbon.
REFERENCES:
patent: 5589557 (1996-12-01), Navarrini et al.
patent: 5830966 (1998-11-01), Thang et al.
patent: 6468712 (2002-10-01), Fedynyshyn
patent: 6733952 (2004-05-01), Kaneko et al.
patent: 6737215 (2004-05-01), Dammel et al.
patent: 6815146 (2004-11-01), Okada et al.
patent: 6818258 (2004-11-01), Kaneko et al.
patent: 6858692 (2005-02-01), Kaneko et al.
patent: 2003/0148213 (2003-08-01), Kaneko et al.
patent: WO 02-065212 (2002-08-01), None
patent: WO 00/17712 (2000-03-01), None
patent: WO 00/67072 (2000-11-01), None
patent: WO 01/63362 (2001-08-01), None
patent: WO 02/64648 (2002-08-01), None
Kaneko Isamu
Kawaguchi Yasuhide
Okada Shinji
Takebe Yoko
Yokokoji Osamu
Asahi Glass Company Limited
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Wu David W.
Wu Ives
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