Fluorine-containing vinyl ethers, their polymers, and resist...

Details Fluorine-containing vinyl ethers, their polymers, and resist... Fluorine-containing vinyl ethers, their polymers, and resist...

2007-08-14

2007-08-14

Keys, Rosalynd (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Oxygen containing

C568S669000, C568S655000, C568S656000, C526S318000, C430S270100

Reexamination Certificate

active

10533788

ABSTRACT:
A fluorine-containing vinyl ether represented by formula 1,wherein R represents an organic group containing at least one fluorine atom and a cyclic structure is provided. A fluorine-containing copolymer containing (a) a first unit derived from a first monomer that is a fluorine-containing vinyl ether represented by formula 8:where R1is —H or a C1-C8alkyl group that optionally contains an oxygen atom; and (b) a second unit derived from a second monomer that is at least one selected from acrylic esters and methacrylic esters is also provided.

REFERENCES:
patent: 3371064 (1968-02-01), Wall et al.
patent: 3488335 (1970-01-01), Braun et al.
patent: 3529003 (1970-09-01), Rausch et al.
patent: 3752789 (1973-08-01), Khan et al.
patent: 6858760 (2005-02-01), Komoriya et al.
patent: 2003/0219679 (2003-11-01), Sasaki et al.
patent: 2003/0232277 (2003-12-01), Sasaki et al.
patent: 2003/0236369 (2003-12-01), Komoriya et al.
patent: 2004/0214102 (2004-10-01), DiPietro et al.
patent: 536690 (1993-04-01), None
patent: 2002-201231 (2002-07-01), None
patent: 2003-316004 (2003-11-01), None
patent: 2003-327686 (2003-11-01), None
patent: 95/20021 (1995-07-01), None
patent: 02/36646 (2002-05-01), None
An article by Y. Kamon et al entitled, “Newly Developed Acryclic Copolymers for ArF Photoresist”, Journal of Photopolymer Science and Technology vol. 15, No. 4 (Jun. 2002) 535-540.
An article by Robert McClelland et al entitled, “Mechanism of Hydrolysis of Aryl Vinyl Selenides, Selenium-Stabilized Carbonium Ions”, J. Org. Chem. Jan. 1980, 45, 187-189.
An article by Ernst Eibler et al entitled, Polyhalogenated Cyclopentadienes in [4+2] Cycloadditions: Preparative Aspects, Liebigs Ann./Recueil *1997, 2451-2469.
An article by Raymond G. Plevey et al entitled, “Polyfluorocycloalkenes, Part XVII, Further Preparations of Alkoxy-Nonafluorocyclohexenes and their Pyrolyses to Polyfluorocyclohex-2-Enones”, Journal of Fluorine Chemistry, 26 (Dec. 1984) 515-531.

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